スピン・エレクトロニクスグループ
テーマスライド

材料から応用デバイスまで一貫して研究できるような装置群を揃えています。

装置

居室

クリーンルーム

RF-DIBS
(Radio Frequency - Dual Ion Beam Sputtering equipm.)

DC-DIBS
(Direct Current - Dual Ion Beam Sputtering equipm.)

Magnetoron sputtering equipm. (1)

Magnetoron sputtering equipm. (2)

Spin Coater

Mask Aligner

E-beam

Wire Bonding equipm.

Polirized light Spectroscopy Microscope

Vacuum Anneal equipm.

Ultrasonic washing machine

Heater

Draft chamber

SEM室

FE-SEM

VSM

準備中

MFM

Electrical Furnace

Stylus profilometer

Abrasive machine

Quick coater

Micrometer

MO室

MO measurement equipm.

Spectrophotometer

AFM

OPO室

STM

OPO laser

保管室

A lot of parts

Lock-in-amp

PEM controller, lock-in-amp

スピン室

Spectrum analyzer

Magnetostriction measurement equipm.

Electromagnet

Gaussmeter

Digital Oscilloscope

AD室

AD equipm.
Aerogel deposition equipm.)

AD equipm. (2)

AD equipm. (3)

Ball mill

Electrical Furnace

Electronic scale

ダイシング室

Dicing saw

Wire saw

Draft Chamber

ウェット室

Spin Coater

Environmental tester

Electrical Furnace

Draft Chamber

Stamper (1)

Stamper (2)

Supersonic washing machine

Mixer

Electrical coating